Optical emission spectroscopy of low temperature PECVD of diamond and DLC films
"The gas phase chemistry in low temperature (<300°C) diamond and diamond-like carbon (DLC) chemical vapor deposition processes was investigated using optical emission spectroscopy (OES) to determine the effects of the different deposition parameters such as methane concentration, substrate t...
| मुख्य लेखक: | |
|---|---|
| स्वरूप: | थीसिस |
| भाषा: | English |
| प्रकाशित: |
c2004.
|
| विषय: |