00000cam a22000004a 4500 UP-99796217610334214 Buklod 20120525160815.0 m |o d | ta 100317s2010 enka rb |001 0|eng d 9780470749838 Php4,245.28 (Forefront) : MMM Dept. (iLib)UPD-00184905359 DLC DENG eng TK 7875 F73 2010 Franssila, Sami. Introduction to microfabrication Sami Franssila. 2nd ed. Chichester, West Sussex John Wiley & Sons 2010. xiv, 518 p. ill. John Jude C. Laurito (Recommending faculty) Microelectromechanical systems. Electronic apparatus and appliances. Microfabrication. MatE 197. FO Monograph UPD DENG-II TK 7875 F73 2010 Book