APA (7th ed.) Citation

Reinhardt, K. A., & aReidy, R. F. (2011). Handbook of cleaning for semiconductor manufacturing: Fundamentals and applications. Scrivener.

Chicago Style (17th ed.) Citation

Reinhardt, Karen A., and Richard F. aReidy. Handbook of Cleaning for Semiconductor Manufacturing: Fundamentals and Applications. Salem, Mass: Scrivener, 2011.

MLA (9th ed.) Citation

Reinhardt, Karen A., and Richard F. aReidy. Handbook of Cleaning for Semiconductor Manufacturing: Fundamentals and Applications. Scrivener, 2011.