APA (7th ed.) Citation

Fernandez, M. S. (2004). Formation of SiHx on Silicon (100) using low energy negative hydrogen ions from a magnetized sheet plasma source.

Chicago Style (17th ed.) Citation

Fernandez, Marcedon S. Formation of SiHx on Silicon (100) Using Low Energy Negative Hydrogen Ions from a Magnetized Sheet Plasma Source. 2004.

MLA (9th ed.) Citation

Fernandez, Marcedon S. Formation of SiHx on Silicon (100) Using Low Energy Negative Hydrogen Ions from a Magnetized Sheet Plasma Source. 2004.

Warning: These citations may not always be 100% accurate.