Chemical vapor deposition thermal and plasma deposition of electronic materials

Chemical vapor deposition thermal and plasma deposition of electronic materials

Detaylı Bibliyografya
Yazar: Sivaram, S.
Materyal Türü: Kitap
Dil:English
Baskı/Yayın Bilgisi: New York Van Nostrand Reinhold c1995.
Konular:
Microelectronics industry.
Chemical vapor deposition.
Microelectronics > Materials.