Chemical vapor deposition thermal and plasma deposition of electronic materials

Chemical vapor deposition thermal and plasma deposition of electronic materials

Bibliografiska uppgifter
Huvudupphovsman: Sivaram, S.
Materialtyp: Bok
Språk:English
Publicerad: New York Van Nostrand Reinhold c1995.
Ämnen:
Microelectronics industry.
Chemical vapor deposition.
Microelectronics > Materials.