Chemical vapor deposition thermal and plasma deposition of electronic materials

Chemical vapor deposition thermal and plasma deposition of electronic materials

Bibliografske podrobnosti
Glavni avtor: Sivaram, S.
Format: Knjiga
Jezik:English
Izdano: New York Van Nostrand Reinhold c1995.
Teme:
Microelectronics industry.
Chemical vapor deposition.
Microelectronics > Materials.