Chemical vapor deposition thermal and plasma deposition of electronic materials

Chemical vapor deposition thermal and plasma deposition of electronic materials

Detalhes bibliográficos
Autor principal: Sivaram, S.
Formato: Livro
Idioma:English
Publicado em: New York Van Nostrand Reinhold c1995.
Assuntos:
Microelectronics industry.
Chemical vapor deposition.
Microelectronics > Materials.