Chemical vapor deposition thermal and plasma deposition of electronic materials

Chemical vapor deposition thermal and plasma deposition of electronic materials

Dettagli Bibliografici
Autore principale: Sivaram, S.
Natura: Libro
Lingua:English
Pubblicazione: New York Van Nostrand Reinhold c1995.
Soggetti:
Microelectronics industry.
Chemical vapor deposition.
Microelectronics > Materials.