Chemical vapor deposition thermal and plasma deposition of electronic materials

Chemical vapor deposition thermal and plasma deposition of electronic materials

Sonraí bibleagrafaíochta
Príomhchruthaitheoir: Sivaram, S.
Formáid: LEABHAR
Teanga:English
Foilsithe / Cruthaithe: New York Van Nostrand Reinhold c1995.
Ábhair:
Microelectronics industry.
Chemical vapor deposition.
Microelectronics > Materials.