Chemical vapor deposition thermal and plasma deposition of electronic materials

Chemical vapor deposition thermal and plasma deposition of electronic materials

Xehetasun bibliografikoak
Egile nagusia: Sivaram, S.
Formatua: Liburua
Hizkuntza:English
Argitaratua: New York Van Nostrand Reinhold c1995.
Gaiak:
Microelectronics industry.
Chemical vapor deposition.
Microelectronics > Materials.