Chemical vapor deposition thermal and plasma deposition of electronic materials

Bibliographische Detailangaben
1. Verfasser:	Sivaram, S.
Format:	Buch
Sprache:	English
Veröffentlicht:	New York Van Nostrand Reinhold c1995.
Schlagworte:	Microelectronics industry. Chemical vapor deposition. Microelectronics > Materials.