Chemical vapor deposition thermal and plasma deposition of electronic materials

Chemical vapor deposition thermal and plasma deposition of electronic materials

Bibliografiske detaljer
Hovedforfatter: Sivaram, S.
Format: Bog
Sprog:English
Udgivet: New York Van Nostrand Reinhold c1995.
Fag:
Microelectronics industry.
Chemical vapor deposition.
Microelectronics > Materials.