Chemical vapor deposition thermal and plasma deposition of electronic materials

Chemical vapor deposition thermal and plasma deposition of electronic materials

Podrobná bibliografie
Hlavní autor: Sivaram, S.
Médium: Kniha
Jazyk:English
Vydáno: New York Van Nostrand Reinhold c1995.
Témata:
Microelectronics industry.
Chemical vapor deposition.
Microelectronics > Materials.