Chemical vapor deposition thermal and plasma deposition of electronic materials

Chemical vapor deposition thermal and plasma deposition of electronic materials

ग्रंथसूची विवरण
मुख्य लेखक: Sivaram, S.
स्वरूप: पुस्तक
भाषा:English
प्रकाशित: New York Van Nostrand Reinhold c1995.
विषय:
Microelectronics industry.
Chemical vapor deposition.
Microelectronics > Materials.