APA (7th ed.) Citation

Sivaram, S. (1995). Chemical vapor deposition: Thermal and plasma deposition of electronic materials. Van Nostrand Reinhold.

Chicago Style (17th ed.) Citation

Sivaram, S. Chemical Vapor Deposition: Thermal and Plasma Deposition of Electronic Materials. New York: Van Nostrand Reinhold, 1995.

MLA (9th ed.) Citation

Sivaram, S. Chemical Vapor Deposition: Thermal and Plasma Deposition of Electronic Materials. Van Nostrand Reinhold, 1995.