00000cab a22000003a 4500 UP-99796217609712605 Buklod 20231007235729.0 m |o d | ta 110305s xx d | ||r ||||| || DENGII eng Minkel, J.R. A Tabletop UV Microscope. pp. 16 Researchers from the Colorado State University and Lawrence Berkeley National Laboratory's Center for X-ray Optics have developed a high-resolution ultraviolet microscope that fits on a tabletop. Researchers were able to get enough resolving power from a relatively small setup by providing a better alignment of the titanium-sapphire laser, the silver-cadmium pellet, and the diffraction plates. These tabletop UV lasers have the potential to serve as candidate inspection systems for future lithographic masks Colorado State University. Lawrence Berkeley National Laboratory Center. X-ray Optics. High-resolution ultraviolet microscope. Inspection systems. Lithographic masks. Silver-cadmium pellet. Tabletop UV microscope. Titanium-sapphire laser. IEEE spectrum 43, 9 (2006). FO UPD DENG-II Article