Mechanical radio.
Micromechanical resonators are often fabricated from silicon, using techniques similar to those employed in making microelectronic circuits. Perhaps the simplest resonator that can be made this way is a beam fixed at both ends and excited using an electrode placed under the freely suspended middle p...
| Udgivet i: | IEEE spectrum 46, 12 (2009). |
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| Hovedforfatter: | |
| Format: | Article |
| Sprog: | English |
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