Petri-net and GA-based approach to modeling, scheduling, and performance evaluation for wafer fabrication.

Petri-net and GA-based approach to modeling, scheduling, and performance evaluation for wafer fabrication.

A genetic algorithm (GA) embedded search strategy over a colored timed Petri net (CTPN) for wafer fabrication is proposed. Through the CTPN model, all possible behaviors of the wafer manufacturing systems, such as WIP status and machine status, can be completely tracked down by the reachability grap...

詳細記述

書誌詳細
出版年:IEEE Transactions on robotics and automation 17, 5 (2001).
第一著者: Jyh-Horn Chen
フォーマット: 論文
言語:English
主題:
Colored timed Petri.
Genetic algorithm.
Performance evaluation.
Production control.
Scheduling.
Search method.
Semiconductor manufacturing.
Wafer fabrication.
Wafer manufacturing.