Modeling and analysis of semiconductor manufacturing systems with degraded behavior using Petri nets and siphons.
Degraded behavior, such as reworks, failures, and maintenance, of a semiconductor manufacturing system (SMS) is not negligible in practice. When modeled by Petri nets, degraded behavior may be represented as initially unmarked elementary circuits, interpreted as local processing cycles. We extend th...
| Published in: | IEEE Transactions on robotics and automation 17, 5 (2001). |
|---|---|
| Main Author: | |
| Format: | Article |
| Language: | English |
| Subjects: |