MuDer Jeng. Modeling and analysis of semiconductor manufacturing systems with degraded behavior using Petri nets and siphons. IEEE Transactions on robotics and automation.
Chicago Style (17th ed.) CitationMuDer Jeng. "Modeling and Analysis of Semiconductor Manufacturing Systems with Degraded Behavior Using Petri Nets and Siphons." IEEE Transactions on Robotics and Automation .
MLA (9th ed.) CitationMuDer Jeng. "Modeling and Analysis of Semiconductor Manufacturing Systems with Degraded Behavior Using Petri Nets and Siphons." IEEE Transactions on Robotics and Automation, .
Warning: These citations may not always be 100% accurate.