MuDer Jeng. Modeling and analysis of semiconductor manufacturing systems with degraded behavior using Petri nets and siphons. IEEE Transactions on robotics and automation.
Cita Chicago Style (17a ed.)MuDer Jeng. "Modeling and Analysis of Semiconductor Manufacturing Systems with Degraded Behavior Using Petri Nets and Siphons." IEEE Transactions on Robotics and Automation .
Cita MLA (9a ed.)MuDer Jeng. "Modeling and Analysis of Semiconductor Manufacturing Systems with Degraded Behavior Using Petri Nets and Siphons." IEEE Transactions on Robotics and Automation, .
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