Timed Petri nets in modeling and analysis of cluster tools.
Timed Petri nets are used as models of cluster tools representing the flow of wafers through the chambers of the tool as well as sequences of actions performed by the robotic transporter. Since the durations of all activities are also represented in the model, performance characteristics can be deri...
| 发表在: | IEEE Transactions on robotics and automation 17, 5 (2001). |
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| 格式: | 文件 |
| 语言: | English |
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