APA (7th ed.) Citation

Zuberek, W. Timed Petri nets in modeling and analysis of cluster tools. IEEE Transactions on robotics and automation.

Chicago Style (17th ed.) Citation

Zuberek, W.M. "Timed Petri Nets in Modeling and Analysis of Cluster Tools." IEEE Transactions on Robotics and Automation .

MLA (9th ed.) Citation

Zuberek, W.M. "Timed Petri Nets in Modeling and Analysis of Cluster Tools." IEEE Transactions on Robotics and Automation, .

Warning: These citations may not always be 100% accurate.