A diode-based two-wire solution for temperature-compensated piezoresistive pressure sensors.

A diode-based two-wire solution for temperature-compensated piezoresistive pressure sensors.

A novel two-wire solution for ultraminiaturized temperature-compensated piezoresistive pressure sensors is presented. The technique makes it possible to measure both pressure and temperature separately by using bias-controlled diodes as switches between the pressure and temperature sensing elements....

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Bibliographic Details
Published in:IEEE Transactions on electron devices 50, 2 (2003).
Main Author: Melvas, P.
Format: Article
Language:English
Subjects:
Si.
Bias-controlled diodes switches.
Diode-based two-wire technique.
Disposable blood pressure sensors.
Double end supported beam.
Force-transducing beam.
P-n junction diodes.
Piezoresistive pressure sensors.
Polysilicon diaphragm.
Pressure sensing element.
Surface micromachined pressure sensor.
Temperature sensing element.
Temperature-compensated pressure sensors.
Thermal compensation piezoresistor.
Ultraminiaturized pressure sensors.