Harned, N. Ultralight lithography [IC manufacture]. IEEE spectrum.
Chicago Style (17th ed.) CitationHarned, N. "Ultralight Lithography [IC Manufacture]." IEEE Spectrum .
MLA (9th ed.) CitationHarned, N. "Ultralight Lithography [IC Manufacture]." IEEE Spectrum, .
Warning: These citations may not always be 100% accurate.