APA (7th ed.) Citation

Harned, N. Ultralight lithography [IC manufacture]. IEEE spectrum.

Chicago Style (17th ed.) Citation

Harned, N. "Ultralight Lithography [IC Manufacture]." IEEE Spectrum .

MLA (9th ed.) Citation

Harned, N. "Ultralight Lithography [IC Manufacture]." IEEE Spectrum, .

Warning: These citations may not always be 100% accurate.