APA (7th ed.) Citation

Hutcheson, G. Extreme ultraviolet lithography: Will it be ready in time? IEEE spectrum.

Chicago Style (17th ed.) Citation

Hutcheson, G.D. "Extreme Ultraviolet Lithography: Will It Be Ready in Time?" IEEE Spectrum .

MLA (9th ed.) Citation

Hutcheson, G.D. "Extreme Ultraviolet Lithography: Will It Be Ready in Time?" IEEE Spectrum, .

Warning: These citations may not always be 100% accurate.