Chip making's wet new world.

Putting a drop of water between the lens and the silicon wafer allows a system to resolve lines a few hundred atoms wide. Researchers are counting on it to lift the technology from its last legs and carry it through the end of the decade.

Bibliografische gegevens

Gepubliceerd in:	IEEE spectrum 41, 5 (2004).
Hoofdauteur:	Geppert, L.
Formaat:	Artikel
Taal:	English
Onderwerpen:	IC sites. Immersion lithography. Light beam. Lithographic system. Optical lithography. Optical wavelength reduction. Refractive index. Wafer packaging.