Chip making's wet new world.
Putting a drop of water between the lens and the silicon wafer allows a system to resolve lines a few hundred atoms wide. Researchers are counting on it to lift the technology from its last legs and carry it through the end of the decade.
| 出版年: | IEEE spectrum 41, 5 (2004). |
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| 第一著者: | |
| フォーマット: | 論文 |
| 言語: | English |
| 主題: |