Chip making's wet new world.

Putting a drop of water between the lens and the silicon wafer allows a system to resolve lines a few hundred atoms wide. Researchers are counting on it to lift the technology from its last legs and carry it through the end of the decade.

Xehetasun bibliografikoak
Argitaratua izan da:IEEE spectrum 41, 5 (2004).
Egile nagusia: Geppert, L.
Formatua: Artikulua
Hizkuntza:English
Gaiak: