Future Fab.

This paper presents the software suite dubbed automated manufacturing technology (AMT) that monitors and controls the hundreds of steps wafers must pass through on their way to becoming Pentium, Itanium, and Core 2 Duo processors, as well as other high-end Intel microprocessors. The AMT suite has fo...

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书目详细资料
发表在:IEEE spectrum 44, 3 (2007).
主要作者: Mouli, C.
格式: 文件
语言:English
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