Plasma electronics applications in microelectronic device fabrication - Makabe, Toshiaki; Petrovic, Zoran Lj. (New York Taylor & Francis, 2006)
College of Science Library has electronic copy. Kindly send us a message through cslib@science.upd.edu.ph using your UP mail for the copy of this material.
Includes bibliographical references and index
Keywords: Plasma engineer; Electronic books