Microfabrication and nanomanufacturing - Jackson, Mark J. (Boca Raton, Fla. CRC/Taylor & Francis, 2006)
Prof. Reinol Joseph D.C. Compañero (recommending faculty) : MMM Dept.
Keywords: Microelectronics; Integrated circuits -- Design and construction; Nanomanufacturing; Microelectromechanical systems -- Design and construction