Novel VOA using in-plane reflective micromirror and off-axis light attenuation.
A new off-axis light attenuation configuration combining with a movable reflective micromirror is proposed for variable optical attenuator (VOA) application. Comprehensive study of new comb drive actuators of a two-step structure is done to achieve large displacement of an actuated micromirror for V...
| Gepubliceerd in: | IEEE Communications magazine 41, 8 (2003). |
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| Formaat: | Artikel |
| Taal: | Engels |
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