Design and implementation of a high sensitivity differential capacitance sensing circuit for MEMS accelerometers

MEMS Accelerometers have diverse applications ranging from vehicle deployment systems, industrial process control, vibration monitoring, space launches and inertial measurements. For robotics applications such as tilt measurements, a high sensitivity accelerometer capable of detecting very small G v...

Fuld beskrivelse

Bibliografiske detaljer
Hovedforfatter: Estrada, Erik John C.
Format: Thesis
Sprog:English
Udgivet: 2009
Fag: