Design and implementation of a high sensitivity differential capacitance sensing circuit for MEMS accelerometers
MEMS Accelerometers have diverse applications ranging from vehicle deployment systems, industrial process control, vibration monitoring, space launches and inertial measurements. For robotics applications such as tilt measurements, a high sensitivity accelerometer capable of detecting very small G v...
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| Formato: | Tese |
| Idioma: | English |
| Publicado em: |
2009
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