Semiconductor fabrication technology and metrology - Gupta, D. C. (Dinesh C.).; ASTM Committee F-1 on Electronics; Semiconductor Equipment and Materials Institute; Symposium on Semiconductor Processing 1988 Santa Clara, Calif.). (Philadelphia, PA ASTM, 1989)
Papers originally presented at the Fifth International Symposium on Semiconductor Processing, held at Santa Clara, Calif., on Feb. 1-5, 1988, sponsored by ASTM Committee F-1 on Electronics and Semiconductor Equipment & Materials Institute.
"ASTM publication code number (PCN) 04-990000-46"--T.p. verso.
Includes bibliographical references and indexes.
Keywords: Semiconductors -- Design and construction -- Congresses