ASTM Committee F-1 on Electronics, Semiconductor Equipment and Materials Institute, Symposium on Semiconductor Processing, & Gupta, D. C. (1989). Semiconductor fabrication: Technology and metrology. ASTM.
Chicago Style (17th ed.) CitationASTM Committee F-1 on Electronics, Semiconductor Equipment and Materials Institute, Symposium on Semiconductor Processing, and D. C. Gupta. Semiconductor Fabrication: Technology and Metrology. Philadelphia, PA: ASTM, 1989.
MLA (9th ed.) CitationASTM Committee F-1 on Electronics, et al. Semiconductor Fabrication: Technology and Metrology. ASTM, 1989.
Warning: These citations may not always be 100% accurate.