MEMS applications

Bibliografiske detaljer
Andre forfattere:	Gad-el-Hak, Mohamed 1945-
Format:	Bog
Sprog:	English
Udgivet:	Boca Raton, Fla. CRC Press/Taylor & Francis c2006.
Udgivelse:	2nd ed.
Fag:	Microelectromechanical systems. Detectors. Microactuators. Robots.