Plasma deposition of amorphous silicon-based materials.

Plasma deposition of amorphous silicon-based materials.

書目詳細資料
主要作者: Bruno, Giovanni
格式: 圖書
語言:English
出版: Boston Academic Press 1995
叢編:Plasma--materials interactions
主題:
Amorphous semiconductors > Design and construction.
Plasma-enhanced chemical vapor deposition.
Silicon alloys.