Plasma deposition of amorphous silicon-based materials.

Manylion Llyfryddiaeth
Prif Awdur:	Bruno, Giovanni
Fformat:	Llyfr
Iaith:	English
Cyhoeddwyd:	Boston Academic Press 1995
Cyfres:	Plasma--materials interactions
Pynciau:	Amorphous semiconductors > Design and construction. Plasma-enhanced chemical vapor deposition. Silicon alloys.