APA (7th ed.) Citation

Brodie, I. (1992). The Physics of micro/nano-fabrication. Plenum Press.

Chicago Style (17th ed.) Citation

Brodie, Ivor. The Physics of Micro/nano-fabrication. New York: Plenum Press, 1992.

MLA (9th ed.) Citation

Brodie, Ivor. The Physics of Micro/nano-fabrication. Plenum Press, 1992.