Williams, J. (1984). Ion implantation and beam processing. Academic Press.
Chicago Style (17th ed.) CitationWilliams, J.S. Ion Implantation and Beam Processing. New York: Academic Press, 1984.
MLA (9th ed.) CitationWilliams, J.S. Ion Implantation and Beam Processing. Academic Press, 1984.
Warning: These citations may not always be 100% accurate.