Middleman, S., & Hochberg, A. K. (1993). Process engineering analysis in semiconductor device fabrication. McGraw-Hill.
Citación estilo ChicagoMiddleman, Stanley, and Arthur K. Hochberg. Process Engineering Analysis in Semiconductor Device Fabrication. New York: McGraw-Hill, 1993.
Cita MLAMiddleman, Stanley, and Arthur K. Hochberg. Process Engineering Analysis in Semiconductor Device Fabrication. McGraw-Hill, 1993.
Warning: These citations may not always be 100% accurate.