Middleman, S., & Hochberg, A. K. (1993). Process engineering analysis in semiconductor device fabrication. McGraw-Hill.
Chicago Style aipamenaMiddleman, Stanley, and Arthur K. Hochberg. Process Engineering Analysis in Semiconductor Device Fabrication. New York: McGraw-Hill, 1993.
MLA aipamenaMiddleman, Stanley, and Arthur K. Hochberg. Process Engineering Analysis in Semiconductor Device Fabrication. McGraw-Hill, 1993.
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