Cita APA (7th ed.)

Middleman, S., & Hochberg, A. K. (1993). Process engineering analysis in semiconductor device fabrication. McGraw-Hill.

Cita Chicago (17th ed.)

Middleman, Stanley, i Arthur K. Hochberg. Process Engineering Analysis in Semiconductor Device Fabrication. New York: McGraw-Hill, 1993.

Cita MLA (9th ed.)

Middleman, Stanley, i Arthur K. Hochberg. Process Engineering Analysis in Semiconductor Device Fabrication. McGraw-Hill, 1993.

Atenció: Aquestes cites poden no estar 100% correctes.