Middleman, S., & Hochberg, A. K. (1993). Process engineering analysis in semiconductor device fabrication. McGraw-Hill.
Cita Chicago (17th ed.)Middleman, Stanley, i Arthur K. Hochberg. Process Engineering Analysis in Semiconductor Device Fabrication. New York: McGraw-Hill, 1993.
Cita MLA (9th ed.)Middleman, Stanley, i Arthur K. Hochberg. Process Engineering Analysis in Semiconductor Device Fabrication. McGraw-Hill, 1993.
Atenció: Aquestes cites poden no estar 100% correctes.