Integrated circuits chemical and physical processing

Detalles Bibliográficos
Autor Principal:	Stroeve, Pieter, 1945-
Autor Corporativo:	American Chemical Society. Division of Industrial and Engineering Chemistry
Formato:	Libro
Idioma:	English
Publicado:	Washington, D.C. American Chemical Society 1985
Series:	ACS symposium series nACS symposium series
Subjects:	Integrated circuits -- Very large scale integration -- Design and construction > Congresses.