Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

Bibliografiska uppgifter
Huvudupphovsman: Venezuela, Jeffrey De Guzman
Materialtyp: Lärdomsprov
Språk:English
Publicerad: 2003.
Ämnen:
Titanium compounds > Thermal properties.
Silicon compounds > Thermal properties.
Titanium nitride.
Thin films > Testing.