Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

Библиографические подробности
Главный автор: Venezuela, Jeffrey De Guzman
Формат: Диссертация
Язык:English
Опубликовано: 2003.
Предметы:
Titanium compounds > Thermal properties.
Silicon compounds > Thermal properties.
Titanium nitride.
Thin films > Testing.