Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

Sonraí bibleagrafaíochta
Príomhchruthaitheoir: Venezuela, Jeffrey De Guzman
Formáid: Tráchtas
Teanga:English
Foilsithe / Cruthaithe: 2003.
Ábhair:
Titanium compounds > Thermal properties.
Silicon compounds > Thermal properties.
Titanium nitride.
Thin films > Testing.