Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

Détails bibliographiques
Auteur principal: Venezuela, Jeffrey De Guzman
Format: Thèse
Langue:English
Publié: 2003.
Sujets:
Titanium compounds > Thermal properties.
Silicon compounds > Thermal properties.
Titanium nitride.
Thin films > Testing.