Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

Bibliographische Detailangaben
1. Verfasser: Venezuela, Jeffrey De Guzman
Format: Abschlussarbeit
Sprache:English
Veröffentlicht: 2003.
Schlagworte:
Titanium compounds > Thermal properties.
Silicon compounds > Thermal properties.
Titanium nitride.
Thin films > Testing.