Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

Thermal stability study on titanium disilicide (TiSi2) thin films with titanium nitride (TiN) capping

Bibliografiske detaljer
Hovedforfatter: Venezuela, Jeffrey De Guzman
Format: Thesis
Sprog:English
Udgivet: 2003.
Fag:
Titanium compounds > Thermal properties.
Silicon compounds > Thermal properties.
Titanium nitride.
Thin films > Testing.